Dr. Alexander Gottwald
Researcher at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Websites:
Publications (13)

Proceedings Article | 4 October 2023 Presentation
Proceedings Volume PC12695, PC1269507 (2023) https://doi.org/10.1117/12.2681821
KEYWORDS: Vacuum ultraviolet, Reflectivity, Refractive index, Reflectance spectroscopy, Polarization, Absorption, Thin films, Spectroscopy, Semiconductors, Semiconductor manufacturing

Proceedings Article | 27 April 2023 Paper
Proceedings Volume 12496, 124963B (2023) https://doi.org/10.1117/12.2659369
KEYWORDS: Optical constants, Vacuum ultraviolet, Ruthenium, Extreme ultraviolet, X-rays, Thin films, Reflectometry, Monte Carlo methods, Film thickness

Proceedings Article | 13 December 2020 Presentation + Paper
Julian Heymes, Matthew Soman, Thomas Buggey, Chiaki Crews, George Randall, Alexander Gottwald, Andrew Harris, Andrew Kelt, Udo Kroth, Ian Moody, Xiao Meng, Oskar Ogor, Andrew Holland
Proceedings Volume 11454, 114541G (2020) https://doi.org/10.1117/12.2559711
KEYWORDS: Ultraviolet radiation, Image processing, Quantum efficiency, Calibration, Image sensors, Sensors, X-ray optics, X-rays, Wafer-level optics, Reflectivity

Proceedings Article | 6 July 2018 Presentation + Paper
J.-P. Halain, E. Renotte, F. Auchère, D. Berghmans, F. Delmotte, L. Harra, W. Schmutz, U. Schühle, R. Aznar Cuadrado, C. Dumesnil, M. Gyo, T. Kennedy, C. Verbeeck, J. Barbay, B. Giordanengo, S. Gissot , A. Gottwald, K. Heerlein, M.-L. Hellin, A. Hermans, V. Hervier, L. Jacques, C. Laubis, A. Mazzoli, S. Meining, R. Mercier, A. Philippon, S. Roose, L. Rossi, F. Scholze, P. Smith, L. Teriaca, X. Zhang, P. Rochus
Proceedings Volume 10699, 106990H (2018) https://doi.org/10.1117/12.2309339
KEYWORDS: Extreme ultraviolet, Calibration, Cameras, Mirrors, Optical alignment, Sensors, Telescopes, Interferometry, Fermium, Frequency modulation

Proceedings Article | 18 July 2016 Paper
Proceedings Volume 9905, 990547 (2016) https://doi.org/10.1117/12.2231405
KEYWORDS: Sensors, Calibration, Clocks, Diodes, Logic, Capacitors, Spectroscopy, Particles, Ions, Resistors

Proceedings Article | 26 September 2013 Paper
A. Fludra, D. Griffin, M. Caldwell, P. Eccleston, J. Cornaby, D. Drummond, W. Grainger, P. Greenway, T. Grundy, C. Howe, C. McQuirk, K. Middleton, O. Poyntz-Wright, A. Richards, K. Rogers, C. Sawyer, B. Shaughnessy, S. Sidher, I. Tosh, S. Beardsley, G. Burton, A. Marshall, N. Waltham, S. Woodward, T. Appourchaux, A. Philippon, F. Auchere, E. Buchlin, A. Gabriel, J.-C. Vial, U. Schühle, W. Curdt, D. Innes, S. Meining, H. Peter, S. Solanki, L. Teriaca, M. Gyo, V. Büchel, M. Haberreiter, D. Pfiffner, W. Schmutz, M. Carlsson, S. Haugan, J. Davila, P. Jordan, W. Thompson, D. Hassler, B. Walls, C. Deforest, J. Hanley, J. Johnson, P. Phelan, L. Blecha, H. Cottard, G. Paciotti, N. Autissier, Y. Allemand, K. Relecom, G. Munro, A. Butler, R. Klein, A. Gottwald
Proceedings Volume 8862, 88620F (2013) https://doi.org/10.1117/12.2027581
KEYWORDS: Mirrors, Sensors, Solar processes, Spectroscopy, Space operations, Plasmas, Sun, Extreme ultraviolet, Space telescopes, Telescopes

Proceedings Article | 14 September 2011 Paper
L. Shi, S. Nihtianov, F. Scholze, A. Gottwald, L. Nanver
Proceedings Volume 8145, 81450N (2011) https://doi.org/10.1117/12.891865
KEYWORDS: Extreme ultraviolet, Silicon, Vacuum ultraviolet, Photodiodes, Boron, Deep ultraviolet, Diodes, Extreme ultraviolet lithography, Photodetectors, Ultraviolet radiation

Proceedings Article | 17 July 2010 Paper
Proceedings Volume 7742, 77420U (2010) https://doi.org/10.1117/12.856939
KEYWORDS: Quantum efficiency, Photons, Absorption, Sensors, X-rays, Aluminum, Signal attenuation, Silicon, Monochromators, Semiconductors

Proceedings Article | 10 November 2004 Paper
Alexander Gottwald, SergeJ Bobashev, Ulrich Hahn, Arne Hoehl, Ulf Jastrow, Mathias Richter, Andrej Sorokin, Kai Tiedtke
Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.556289
KEYWORDS: Sensors, Calibration, Free electron lasers, Signal detection, Particles, Ions, Xenon, Radiometry, Synchrotron radiation, Extreme ultraviolet

Proceedings Article | 14 October 2004 Paper
Alexander Gottwald, Udo Kroth, Martin Letz, Hendrik Schoppe, Mathias Richter
Proceedings Volume 5538, (2004) https://doi.org/10.1117/12.556301
KEYWORDS: Reflectometry, Temperature metrology, Reflectivity, Crystals, Excitons, Sensors, Vacuum ultraviolet, Absorption, Synchrotron radiation, Anisotropy

Proceedings Article | 4 February 2004 Paper
Udo Schuehle, Jean-Francois Hochedez, Jose Luis Pau, Carlos Rivera, Elias Munoz, Jose Alvarez, Jean-Paul Kleider, Philippe Lemaire, Thierry Appourchaux, Bernhard Fleck, Anthony Peacock, Mathias Richter, Udo Kroth, Alexander Gottwald, Marie-Claude Castex, Alain Deneuville, Pierre Muret, Milos Nesladek, Franck Omnes, Joachim John, Chris Van Hoof
Proceedings Volume 5171, (2004) https://doi.org/10.1117/12.507730
KEYWORDS: Sensors, Ultraviolet radiation, Diamond, Vacuum ultraviolet, Charge-coupled devices, Microchannel plates, Photodiodes, Imaging arrays, Visible radiation, Photons

Proceedings Article | 20 December 2001 Paper
Roman Klein, Alexander Gottwald, Frank Scholze, R. Thornagel, Johannes Tuemmler, Gerhard Ulm, Marco Wedowski, Frank Stietz, Bas Mertens, Norbert Koster, J. van Elp
Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450950
KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, EUV optics, Optical filters, Extreme ultraviolet lithography, Synchrotron radiation, Radiometry, Lithography, Reflectometry

Proceedings Article | 22 August 2001 Paper
Frank Scholze, Burkhard Beckhoff, G. Brandt, R. Fliegauf, Alexander Gottwald, Roman Klein, Bernd Meyer, U. Schwarz, R. Thornagel, Johannes Tuemmler, Klaus Vogel, J. Weser, Gerhard Ulm
Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436766
KEYWORDS: Mirrors, Extreme ultraviolet, Metrology, Monochromators, Reflectometry, Sensors, Diffraction, Radiometry, Reflectivity, Optical filters

Showing 5 of 13 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top