Cheolin Jang
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940V (2023) https://doi.org/10.1117/12.2658345
KEYWORDS: Etching, Extreme ultraviolet lithography, Metal oxides, Coating, Chemical reactions, Process control, Extreme ultraviolet

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