Dr. Miroslav Cupak Profile

Dr. Miroslav Cupak

at imec

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Logic and memory patterning breakthrough using High-NA lithography

V. Blanco Carballo, S. Roy, B. Chowrira, T. Pham, J. Wouters, S. Das, S. Decoster, P. Leray, R. Liu, K. Ronse, G. Vandenberghe, A. Niroomand, P. Foubert, V. Rutigliani, H. Suh, M. Gupta, D. de Simone, M. Dusa, C. Beral, V. Philipsen, V. Wiaux, J. Franke, J. Bekaert, B. Baskaran, W. Gillijns, R. Kim, Y. Sherazi, H. Vats, M. Cupak, C. Chang, Y.-J. Lin, J. Lee, S. Hwang, K. Yang, K. Miyaguchi

Proceedings Volume 13216, 1321604 (2024) https://doi.org/10.1117/12.3047176

KEYWORDS: Metals, Optical lithography, Logic, Semiconducting wafers, Extreme ultraviolet lithography, Etching, Scanning electron microscopy, Lithography, Tin

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Proceedings Article | 27 March 2019 Presentation + Paper

Standard-cell design architecture options below 5nm node: The ultimate scaling of FinFET and Nanosheet

S. M. Yasser Sherazi, Miroslav Cupak, P. Weckx, O. Zografos, D. Jang, P. Debacker, D. Verkest, A. Mocuta, R. H. Kim, A. Spessot, J. Ryckaert

Proceedings Volume 10962, 1096202 (2019) https://doi.org/10.1117/12.2514569

KEYWORDS: Metals, Optical lithography, Fin field effect transistors, Extreme ultraviolet, Standards development, Silicon, Line edge roughness, Computer architecture, Process control

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