Dr. Bhavishya Chowrira Poovanna Profile

Dr. Bhavishya Chowrira Poovanna

at imec

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Defect inspection methodology for contact holes

D. Van den Heuvel, C. Beral, B. Chowrira, P. Foubert, D. De Simone, G. Lorusso, M. Beggiato, S. Das, A. Charley, M. Sugie, N. Ban, H. Koike, M. Isawa, W. Sun

Proceedings Volume 12955, 129553S (2024) https://doi.org/10.1117/12.3015844

KEYWORDS: Semiconducting wafers, Inspection, Extreme ultraviolet, Metrology, Light sources and illumination, Stochastic processes, Etching, Defect inspection, Transmission electron microscopy

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