Dr. Bhavishya Chowrira Poovanna
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129553S (2024) https://doi.org/10.1117/12.3015844
KEYWORDS: Semiconducting wafers, Inspection, Extreme ultraviolet, Metrology, Light sources and illumination, Stochastic processes, Etching, Defect inspection, Transmission electron microscopy

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top