High-brightness LDP source

Masataka Mamizuka; Teruaki Kawajiri; Koji Suzuki; Yusuke Teramoto; Takahiro Shirai; Shunichi Morimoto; Hidenori Watanabe; Akihisa Nagano; Daisuke Yajima; Noritaka Ashizawa; Kazuya Aoki; Yoshihiko Sato

doi:10.1117/12.2687785

21 November 2023 High-brightness LDP source

Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Kazuya Aoki, Yoshihiko Sato

Author Affiliations +

Proceedings Volume 12750, International Conference on Extreme Ultraviolet Lithography 2023; 1275012 (2023) https://doi.org/10.1117/12.2687785
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

The Laser-assisted Discharge-produced Plasma (LDP) EUV source is a system to generate EUV from discharged plasma triggered by laser on one electrode disc which is coated by tin film. The source has been proven as a highly reliable light source in EUVL high volume production. Also, LDP EUV source enables to generate high brightness with relatively larger EUV plasma, which benefits space stability as well as relatively larger plasma power. In this session, the following items will be presented. (1) LDP EUV source configuration and operation sequence. (2) LDP EUV source key performance (3) Stability Improvement (4) Reliability improvement. (5) Sample exposure application

Citation Download Citation

Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Kazuya Aoki, and Yoshihiko Sato "High-brightness LDP source", Proc. SPIE 12750, International Conference on Extreme Ultraviolet Lithography 2023, 1275012 (21 November 2023); https://doi.org/10.1117/12.2687785

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