Dr. Akihisa Nagano
at USHIO INC.
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 21 November 2023 Paper
Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Kazuya Aoki, Yoshihiko Sato
Proceedings Volume 12750, 1275012 (2023) https://doi.org/10.1117/12.2687785
KEYWORDS: Plasma, Extreme ultraviolet, Extreme ultraviolet lithography, Tin, Reliability, Light sources, Electrodes

Proceedings Article | 29 September 2023 Paper
Proceedings Volume 12915, 1291509 (2023) https://doi.org/10.1117/12.2688117
KEYWORDS: Extreme ultraviolet, Plasma, Tin, Extreme ultraviolet lithography, Inspection, Reliability, Plasma generation, Semiconductors, Light sources, Ions

Proceedings Article | 26 May 2023 Presentation + Paper
Safak Sayan, Kishore Chakravorty, Yusuke Teramoto, Bárbara Santos, Akihisa Nagano, Noritaka Ashizawa, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Kazuya Aoki, Yoshihiko Sato
Proceedings Volume PC12494, PC124940E (2023) https://doi.org/10.1117/12.2671128
KEYWORDS: Extreme ultraviolet, Plasma, Tin, Inspection, Electrodes, Laser irradiation, Vacuum chambers, Reliability, Ions, Pulsed laser operation

Proceedings Article | 1 December 2022 Presentation + Paper
Proceedings Volume 12292, 122920G (2022) https://doi.org/10.1117/12.2641777
KEYWORDS: Plasma, Extreme ultraviolet, Electrodes, Inspection, Photomasks, Light sources, Extreme ultraviolet lithography, Ions, Cameras, Laser irradiation

Proceedings Article | 16 September 2022 Paper
Proceedings Volume 12325, 123250I (2022) https://doi.org/10.1117/12.2642210
KEYWORDS: Extreme ultraviolet, Plasma, Inspection, Extreme ultraviolet lithography, Photomasks, Ions, Tin, Reliability, Plasma generation, Light sources

Showing 5 of 10 publications
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