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Teruaki Kawajiri
at Ushio Inc.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 21 November 2023 Paper
High-brightness LDP source
Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Kazuya Aoki, Yoshihiko Sato
Proceedings Volume 12750, 1275012 (2023) https://doi.org/10.1117/12.2687785
KEYWORDS: Plasma, Extreme ultraviolet, Extreme ultraviolet lithography, Tin, Reliability, Light sources, Electrodes
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