Mr. Heeyoung Go Profile

Heeyoung Go

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 21 November 2023 Presentation + Paper

Analysis method to define photoresist resolution in EUV lithography

Yongbeom Seo, Heeyoung Go, Jinseong Lee, Taehwan Oh, Donghun Shin, Huiseob Shin, Jisun Lee, Sangjin Kim, In-sung Kim, Changmin Park

Proceedings Volume 12750, 127500B (2023) https://doi.org/10.1117/12.2687461

KEYWORDS: Extreme ultraviolet lithography, Critical dimension metrology, Stochastic processes, Optical lithography, Bridges, Scanning electron microscopy, Resistance, Photoresist materials, Extreme ultraviolet, Metals

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Proceedings Article | 28 April 2023 Presentation + Paper

Chemical approach to make the most of EUVL: stochastic effect mitigation with developer and rinse

Hyungju Ryu, Dokyeong Kwon, Jiho Song, Wongi Park, Jinseong Gwak, Haram Ko, Jiyoung Lee, Jinpyoung Kim, Kyungseok Ryu, Sungjo Hwang, Taemin Jeong, Heeyoung Go, Yigwon Kim, Kyoungyong Cho, Sangjin Kim, Changmin Park

Proceedings Volume 12494, 1249404 (2023) https://doi.org/10.1117/12.2656415

KEYWORDS: Extreme ultraviolet, Stochastic processes, Extreme ultraviolet lithography, Lithography, Optical lithography, Photoresist processing, EUV optics, Chemical composition, Semiconductors

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