PROCEEDINGS VOLUME 4601
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS | 7-10 NOVEMBER 2001
Micromachining and Microfabrication Process Technology and Devices
Editor(s): Norman C. Tien, Qing-An Huang
Editor Affiliations +
IN THIS VOLUME

9 Sessions, 75 Papers, 0 Presentations, 0 Posters
Sensors II  (7)
Actuation  (6)
Sensors I  (6)
Modeling  (5)
INTERNATIONAL SYMPOSIUM ON OPTOELECTONICS AND MICROELECTRONICS
7-10 November 2001
Nanjing, China
Sensors II
Hong Wang, Jiong Li, Quanjun Liu, Heping Liu, Zuhong Lu, Jijun Zhu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444684
Micromachining I
Yanfeng Jiang, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444695
Optical Devices
Hong Wang, Xiaojian Cao, Ke Jia, Xueting Chai, Hua Lu, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444715
Sensors II
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444733
Actuation
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444741
Poster Session
Xin Ju, Liangqiang Peng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444758
Micromachining II
Qihong Lou, Lin Zhang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444685
Actuation
Hejun Du, Yongqing Fu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444686
Poster Session
Yuan Luo, Yi Zhang, Shanglian Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444687
Sensors II
Huang-ping Yan, Jun Guo, Yong-jian Feng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444688
Optical Devices
Wenjun Li, Xiaolin Zhao, Bingchu Cai, Guangya Zhou, Mingsheng Zhang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444689
Poster Session
Weiping Zhang, Wenyuan Chen, Di Chen, Xiaomei Chen, Xiaosheng Wu, Zhengfu Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444690
Micromachining I
Qingliang Zhao, Tao Sun, Ying-Chun Liang, Shen Dong, Mingjun Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444691
Poster Session
Aibin Yu, Guifu Ding, Chunsheng Yang, Changmin Li, Haiping Mao, Zhiping Ni
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444692
Sensors I
Gaopan Xu, Guangwen Chen, Guoqing Hu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444693
Modeling
Hao Yin, Minhang Bao, Heng Yang, Shaoqun Shen, Bin Xiong
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444694
Sensors I
Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen, Bin Xiong
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444696
Poster Session
Qingduo Duanmu, Jingquan Tian, Ye Li, Tangren Dan, Yaohua Lu, Delong Jiang, Lichen Fu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444697
Micromachining II
Jingquan Liu, Bingchu Cai, Jun Zhu, Guipu Ding, Xiaolin Zhao, Chunsheng Yang, Di Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444698
Actuation
Yi Zhang, Guifu Ding, Chunsheng Yang, Aibin Yu, Bingchu Cai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444699
RF Applications
Han Tao, Wenkang Shi
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444700
Poster Session
Huijuan Zhang, Zhaoqi Wang, Hongli Liu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444701
Modeling
Deyong Chen, Dafu Cui, Li Wang, Zhongyao Yu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444702
Poster Session
Jing-Xin Dong, Jun-Hua Qin
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444703
Micromachining II
Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, Dacheng Zhang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444704
Poster Session
Jian Chen, Bingchu Cai, Li Wang, Dong Xu, Xiulan Cheng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444705
Guifu Ding, Yi Zhang, Jingquan Liu, Xiaolin Zhao, Bingchu Cai, Tianhui Shen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444706
Guifu Ding, Yi Zhang, Chunsheng Yang, Xiaolin Zhao, Aibin Yu, Tianhui Shen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444707
Modeling
Guangfen Wei, Zhenan Tang, Jun Yu, Philip C.H. Chan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444708
Sensors II
Jun Yu, Zhenan Tang, Guangfen Wei, Philip C.H. Chan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444709
Modeling
Daoheng Sun, Chengzhi Wang, Wenwang Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444710
Sensors II
Chunyang Kong, Y. Ma, M. D. Dong, Wanlu Wang, Kejun Liao, J. Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444711
Optical Devices
Yuanqing Huang, Yongming Chen, Limiao Zhu, Jinghua Zeng
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444712
Micromachining I
Shengyi Li, Zhe-hui Lin, Bing Luo, Yi-fan Dai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444713
Actuation
Bing Luo, Zhe-hui Lin, Shengyi Li, Yi-fan Dai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444714
Li Wang, Jian Chen, Dong Xu, Bingchu Cai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444716
Poster Session
Di Chen, Min Tang, Zhimin Wang, Changmin Li, Zhiping Ni, Di Zhou
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444717
Micromachining I
Hoa Thi Mai Pham, Charles R. de Boer, Cassan C. C. Visser, Pasqualina M. Sarro
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444718
Sensors I
Bin Xiong, Yuelin Wang, Lufeng Che, Weiyuan Wang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444719
Optical Devices
Xuhan Dai, Xiaolin Zhao, Wenjun Li, Bingchu Cai
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444720
Poster Session
Yulie Wu, Xuezhong Wu, Shengyi Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444721
Xuezhong Wu, Yulie Wu, Shengyi Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444722
Sensors II
Zhao-Yong Zhang, Ming Qin, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444723
Sensors I
Xian-Wei Yan, Ming Qin, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444724
RF Applications
Qingquan Liu, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444725
Poster Session
Binking Zhang, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444726
Sensors I
Minxin Zhou, Qing-An Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444727
Micromachining II
Yongkang Zhang, Ming Zhou, Lan Cai, Youyi Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444728
Sensors II
Ming Qin, Qing-An Huang, Zhao-Yong Zhang, Xianwei Yan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444729
Actuation
Xiulan Cheng, Dong Xu, Jian Chen, Bingchu Cai, Guifu Ding
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444730
Poster Session
Xiulan Cheng, Dong Xu, Bingchu Cai, Li Wang, Jian Chen, Gang Li, Shi Xu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444731
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444732
Suyan Liu, Minqiang Bu, Xiongying Ye, Zhaoying Zhou, Dacheng Zhang, Ting Li, Yilong Hao, Zhimin Tan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444734
Yuzhai Pan, Yongqiang Ning, Li Qin, Hui Suo, Yun Liu, Lijun Wang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444735
Micromachining I
Jing Chen, Li-Tian Liu, Zhijian Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444736
Poster Session
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444737
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444738
Jiaru Chu, Junfeng Lu, Yicheng Wu, Wenhao Huang, Ryutaro Maeda, Toshihiro Itoh, Tadatomo Suga
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444739
Optical Devices
Feng Qian, Xiangzhao Wang, Xuefeng Wang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444740
Xuefeng Wang, Xiangzhao Wang, Caini Zhang, Danyang Yu, Gaoting Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444742
Poster Session
Young Ah Kwon, Kyoung-Soo Chae, Dae Sok Jeoung, Jong Yong Kim, Sung Moon
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444743
Modeling
Pei-dong Yu, Guozhong Wang, Minghua Chen, Shizhong Xie
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444744
RF Applications
Yufeng Jin, Haixia Zhang, Min Miao, Kun Tang, Zhihong Li
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444745
Poster Session
DeQiang Chen, YongJun Zhou, Wenhao Huang, Andong Xia
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444746
Sensors I
Rong Zhang, Zhongyu Gao, Zhiyong Chen
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444747
Micromachining II
Congliang Guo, Siyuan Huang, Yingui Zhou, Shinan Qian
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444748
Poster Session
Dongxiang Chi, Guozheng Yan
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444749
Pengfeng Xiao, Nongyao He, Zhengchun Liu, Quanguo He, Jiqing Xu, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444750
Quanguo He, Zhengchun Liu, Nongyao He, Pengfeng Xiao, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444751
Zhengchun Liu, Quanguo He, Pengfeng Xiao, Nongyao He, Zuhong Lu, Liang Bo
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444752
Jiong Li, Hong Wang, Lu Cheng, Yujie Zhao, Heping Liu, Nongyao He, Zuhong Lu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444753
Jingjing Li, Ruifeng Yue, Li-Tian Liu
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444754
Cong-Shun Wang, Hongju Li, Jing Fang, Dacheng Zhang, Sheng Chang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444755
Zhengyuan Zhang, Zhiyu Wen, Shilu Xu, Kaicheng Li, Zhengfan Zhang, Shanglian Huang
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444756
RF Applications
Proceedings Volume Micromachining and Microfabrication Process Technology and Devices, (2001) https://doi.org/10.1117/12.444757
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